تولید و مشخصه‌یابی پوشش محافظ ژرمانیوم-کربن

نوع مقاله: مقاله پژوهشی

نویسندگان

دانشکده مهندسی مواد، دانشگاه صنعتی مالک اشتر

چکیده

هدف از پژوهش حاضر، تولید پوشش محافظ ژرمانیوم-کربن به وسیله فرآیند رسوب‌دهی شیمیایی از بخار به کمک پلاسما (PECVD) با استفاده از پیش‌ماده‌های گازی ژرمان (GeH4) و متان (CH4) و سپس مشخصه‌یابی آن است. برای این منظور، از میکروسکپ الکترونی روبشی گسیل میدانی (FESEM) مجهز به طیف‌سنج تفکیک انرژی (EDS)، پراش‌سنج پرتو ایکس (XRD)، طیف‌سنج مادون‌قرمز تبدیل فوریه (FTIR)، طیف‌سنج فتوالکترون پرتو ایکس (XPS)، طیف‌سنج فروشکست القائیده لیزری (LIBS)، آزمون نانوفرورونده و آزمون چسبندگی استفاده شد. بر اساس ارزیابی ساختاری، پیوند خوردن برخی از اتم‌های ژرمانیوم با اتم‌های کربن و وجود زمینه ژرمانیوم-کربن در پوشش اثبات شد. همچنین نتایج، نشان دهنده تشکیل پوشش ژرمانیوم-کربن آمورف به صورت یک لایه متراکم، همگن و عاری از هرگونه تخلخل و ناپیوستگی با چسبندگی بسیار مناسب به زیرلایه بود. مقدار سختی و مدول الاستیک پوشش ژرمانیوم-کربن به ترتیب حدود 1/7 و GPa 1/95 به دست آمد. 

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